{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Ge", "surface_phase": "pc", "species": {"text": "Ne+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
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Sputtering of Ne+ on Ge(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.1485, "q": 3.57, "mu": 2.006, "epsilonL": 2.074e-05, "Eth": 14.11}, "E_min": 14.11, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
14.11	1.692e-34	
16.91	0.0002013	
20.26	0.001164	
24.28	0.003764	
29.1	0.009514	
34.87	0.02072	
41.79	0.04028	
50.08	0.07073	
60.01	0.1127	
71.91	0.1639	
86.17	0.2197	
103.3	0.2761	
123.7	0.3304	
148.3	0.3819	
177.7	0.4311	
212.9	0.4788	
255.2	0.5259	
305.8	0.573	
366.4	0.6205	
439.1	0.6687	
526.2	0.7177	
630.6	0.7674	
755.7	0.8177	
905.5	0.8683	
1085.0	0.9191	
1300.0	0.9697	
1558.0	1.02	
1867.0	1.069	
2238.0	1.116	
2682.0	1.162	
3213.0	1.205	
3851.0	1.245	
4615.0	1.282	
5530.0	1.315	
6627.0	1.343	
7941.0	1.365	
9516.0	1.382	
11400.0	1.393	
13670.0	1.396	
16380.0	1.392	
19620.0	1.381	
23520.0	1.362	
28180.0	1.335	
33770.0	1.3	
40470.0	1.258	
48490.0	1.21	
58110.0	1.156	
69640.0	1.097	
83450.0	1.035	
-----