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Plasma-Surface Interaction Data Set 314

Sputtering of 4He+ on Ge(pc) at 300 K

  1. B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of 4He+ on Ge(pc) at 300 K

angle = 0.0 deg E /eV P
26.230.0
31.040.0003811
36.730.001424
43.460.003391
51.420.006609
60.840.01133
72.00.01761
85.190.02519
100.80.03355
119.30.04205
141.10.0502
167.00.05766
197.60.06435
233.80.07027
276.70.07551
327.40.08017
387.40.08434
458.40.08807
542.40.09142
641.80.0944
759.50.09702
898.70.09928
1063.00.1012
1258.00.1026
1489.00.1037
1762.00.1043
2085.00.1045
2467.00.1041
2919.00.1033
3454.00.1019
4087.00.1001
4836.00.09774
5722.00.09492
6771.00.09167
8011.00.08803
9480.00.08406
11220.00.07981
13270.00.07537
15710.00.07078
18580.00.06613
21990.00.06147
26020.00.05686
30790.00.05236
36430.00.048
43110.00.04382
51010.00.03985
60360.00.0361
71420.00.0326
84510.00.02934

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]
Coefficients
Fit range

E = 26.23 – 100000