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Plasma-Surface Interaction Data Set 313

Sputtering of 3He+ on Ge(pc) at 300 K

  1. B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of 3He+ on Ge(pc) at 300 K

angle = 0.0 deg E /eV P
32.394.164e-24
38.160.0002259
44.960.0007325
52.970.001615
62.410.003022
73.530.005128
86.630.008106
102.10.01208
120.30.01708
141.70.02299
166.90.02952
196.70.03634
231.70.04306
273.00.04941
321.70.05519
379.00.06033
446.50.06482
526.10.0687
619.90.07202
730.30.07484
860.40.0772
1014.00.07913
1194.00.08066
1407.00.08179
1658.00.08252
1953.00.08286
2302.00.08281
2712.00.08235
3195.00.08149
3764.00.08024
4435.00.0786
5225.00.07659
6156.00.07423
7253.00.07156
8546.00.06862
10070.00.06544
11860.00.06208
13980.00.05858
16470.00.055
19400.00.05139
22860.00.04778
26930.00.04423
31730.00.04076
37390.00.03741
44050.00.03421
51900.00.03116
61140.00.02829
72040.00.0256
84880.00.02309

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]
Coefficients
Fit range

E = 32.39 – 100000