{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Ge", "surface_phase": "pc", "species": {"text": "(3He)+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
------------------------------------------------------------------------
Sputtering of (3He)+ on Ge(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.3206, "q": 0.2127, "mu": 1.319, "epsilonL": 0.0001429, "Eth": 32.39}, "E_min": 32.39, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
32.39	4.164e-24	
38.16	0.0002259	
44.96	0.0007325	
52.97	0.001615	
62.41	0.003022	
73.53	0.005128	
86.63	0.008106	
102.1	0.01208	
120.3	0.01708	
141.7	0.02299	
166.9	0.02952	
196.7	0.03634	
231.7	0.04306	
273.0	0.04941	
321.7	0.05519	
379.0	0.06033	
446.5	0.06482	
526.1	0.0687	
619.9	0.07202	
730.3	0.07484	
860.4	0.0772	
1014.0	0.07913	
1194.0	0.08066	
1407.0	0.08179	
1658.0	0.08252	
1953.0	0.08286	
2302.0	0.08281	
2712.0	0.08235	
3195.0	0.08149	
3764.0	0.08024	
4435.0	0.0786	
5225.0	0.07659	
6156.0	0.07423	
7253.0	0.07156	
8546.0	0.06862	
10070.0	0.06544	
11860.0	0.06208	
13980.0	0.05858	
16470.0	0.055	
19400.0	0.05139	
22860.0	0.04778	
26930.0	0.04423	
31730.0	0.04076	
37390.0	0.03741	
44050.0	0.03421	
51900.0	0.03116	
61140.0	0.02829	
72040.0	0.0256	
84880.0	0.02309	
-----