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Plasma-Surface Interaction Data Set 312

Sputtering of T+ on Ge(pc) at 300 K

  1. B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of T+ on Ge(pc) at 300 K

angle = 0.0 deg E /eV P
30.876.555e-24
36.40.0001873
42.930.0005939
50.630.00128
59.710.002331
70.420.003824
83.050.005796
97.950.008221
115.50.01099
136.20.01394
160.70.01687
189.50.01963
223.50.0221
263.50.02425
310.80.02607
366.60.02758
432.30.0288
509.80.02978
601.30.03053
709.10.03107
836.30.03142
986.30.03159
1163.00.03159
1372.00.03141
1618.00.03107
1908.00.03057
2250.00.02991
2654.00.02911
3130.00.02818
3691.00.02712
4353.00.02596
5134.00.02472
6054.00.02341
7140.00.02205
8421.00.02067
9931.00.01927
11710.00.01789
13810.00.01653
16290.00.0152
19210.00.01393
22660.00.01271
26720.00.01156
31510.00.01048
37170.00.009465
43830.00.008525
51690.00.007656
60960.00.006859
71900.00.006129
84790.00.005464

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]
Coefficients
Fit range

E = 30.87 – 100000