{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Ge", "surface_phase": "pc", "species": {"text": "T+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
------------------------------------------------------------------------
Sputtering of T+ on Ge(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.2998, "q": 0.0815, "mu": 1.301, "epsilonL": 0.0002933, "Eth": 30.87}, "E_min": 30.87, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
30.87	6.555e-24	
36.4	0.0001873	
42.93	0.0005939	
50.63	0.00128	
59.71	0.002331	
70.42	0.003824	
83.05	0.005796	
97.95	0.008221	
115.5	0.01099	
136.2	0.01394	
160.7	0.01687	
189.5	0.01963	
223.5	0.0221	
263.5	0.02425	
310.8	0.02607	
366.6	0.02758	
432.3	0.0288	
509.8	0.02978	
601.3	0.03053	
709.1	0.03107	
836.3	0.03142	
986.3	0.03159	
1163.0	0.03159	
1372.0	0.03141	
1618.0	0.03107	
1908.0	0.03057	
2250.0	0.02991	
2654.0	0.02911	
3130.0	0.02818	
3691.0	0.02712	
4353.0	0.02596	
5134.0	0.02472	
6054.0	0.02341	
7140.0	0.02205	
8421.0	0.02067	
9931.0	0.01927	
11710.0	0.01789	
13810.0	0.01653	
16290.0	0.0152	
19210.0	0.01393	
22660.0	0.01271	
26720.0	0.01156	
31510.0	0.01048	
37170.0	0.009465	
43830.0	0.008525	
51690.0	0.007656	
60960.0	0.006859	
71900.0	0.006129	
84790.0	0.005464	
-----