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Plasma-Surface Interaction Data Set 310

Sputtering of H+ on Ge(pc) at 300 K

  1. B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of H+ on Ge(pc) at 300 K

angle = 0.0 deg E /eV P
88.350.0
102.00.0001299
117.70.0003524
135.90.0006769
156.90.001118
181.10.001682
209.00.002364
241.30.003144
278.50.003986
321.50.004845
371.10.005678
428.30.006446
494.40.007125
570.70.007702
658.80.008172
760.40.008541
877.80.008815
1013.00.009004
1170.00.009116
1350.00.00916
1558.00.009144
1799.00.009072
2076.00.008951
2397.00.008786
2767.00.008582
3194.00.008342
3686.00.008071
4255.00.007775
4912.00.007456
5670.00.00712
6545.00.006772
7554.00.006414
8720.00.006052
10070.00.005689
11620.00.005328
13410.00.004973
15480.00.004627
17870.00.004291
20630.00.003968
23810.00.003658
27490.00.003364
31730.00.003086
36620.00.002824
42270.00.002578
48800.00.002349
56330.00.002135
65020.00.001938
75050.00.001755
86630.00.001588

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]
Coefficients
Fit range

E = 88.35 – 100000