pwiDB

Plasma-Surface Interaction Data Set 309

Sputtering of Ga⁺ on Ga(pc) at 300 K

B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of Ga⁺ on Ga(pc) at 300 K

angle = 0.0 deg	E /eV	P
	16.85	0.0
	20.11	0.0006127
	24.02	0.002339
	28.68	0.005815
	34.24	0.0121
	40.88	0.02275
	48.81	0.03991
	58.29	0.06633
	69.59	0.1051
	83.1	0.1594
	99.22	0.2313
	118.5	0.3215
	141.5	0.429
	168.9	0.5509
	201.7	0.6838
	240.8	0.8245
	287.5	0.9706
	343.3	1.121
	409.9	1.275
	489.4	1.433
	584.4	1.595
	697.8	1.763
	833.1	1.937
	994.8	2.117
	1188.0	2.304
	1418.0	2.498
	1693.0	2.698
	2022.0	2.906
	2414.0	3.119
	2883.0	3.338
	3442.0	3.562
	4110.0	3.788
	4907.0	4.018
	5859.0	4.248
	6996.0	4.477
	8353.0	4.704
	9974.0	4.927
	11910.0	5.144
	14220.0	5.352
	16980.0	5.55
	20270.0	5.736
	24210.0	5.906
	28900.0	6.058
	34510.0	6.19
	41200.0	6.3
	49200.0	6.383
	58740.0	6.439
	70140.0	6.465
	83750.0	6.459

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]

Coefficients

lambda = 0.1105
q = 16.54
mu = 1.488
epsilonL = 3.81e-06
Eth = 16.85

Fit range

E = 16.85 – 100000