{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Ga", "surface_phase": "pc", "species": {"text": "Ga+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
------------------------------------------------------------------------
Sputtering of Ga+ on Ga(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.1105, "q": 16.54, "mu": 1.488, "epsilonL": 3.81e-06, "Eth": 16.85}, "E_min": 16.85, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
16.85	0.0	
20.11	0.0006127	
24.02	0.002339	
28.68	0.005815	
34.24	0.0121	
40.88	0.02275	
48.81	0.03991	
58.29	0.06633	
69.59	0.1051	
83.1	0.1594	
99.22	0.2313	
118.5	0.3215	
141.5	0.429	
168.9	0.5509	
201.7	0.6838	
240.8	0.8245	
287.5	0.9706	
343.3	1.121	
409.9	1.275	
489.4	1.433	
584.4	1.595	
697.8	1.763	
833.1	1.937	
994.8	2.117	
1188.0	2.304	
1418.0	2.498	
1693.0	2.698	
2022.0	2.906	
2414.0	3.119	
2883.0	3.338	
3442.0	3.562	
4110.0	3.788	
4907.0	4.018	
5859.0	4.248	
6996.0	4.477	
8353.0	4.704	
9974.0	4.927	
11910.0	5.144	
14220.0	5.352	
16980.0	5.55	
20270.0	5.736	
24210.0	5.906	
28900.0	6.058	
34510.0	6.19	
41200.0	6.3	
49200.0	6.383	
58740.0	6.439	
70140.0	6.465	
83750.0	6.459	
-----