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Plasma-Surface Interaction Data Set 308

Sputtering of T+ on Ga(pc) at 300 K

  1. B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of T+ on Ga(pc) at 300 K

angle = 0.0 deg E /eV P
21.380.0
25.40.0002995
30.180.001081
35.860.002533
42.610.004898
50.630.00838
60.170.01304
71.490.0187
84.950.02497
100.90.03136
119.90.03741
142.50.04285
169.30.04757
201.20.05159
239.10.05498
284.10.05782
337.50.06019
401.10.06214
476.60.06371
566.30.06494
672.90.06581
799.50.06635
950.00.06655
1129.00.06639
1341.00.06589
1594.00.06504
1894.00.06384
2250.00.0623
2674.00.06045
3177.00.0583
3775.00.0559
4486.00.05328
5330.00.05048
6333.00.04756
7525.00.04455
8942.00.0415
10620.00.03846
12620.00.03546
15000.00.03254
17820.00.02972
21180.00.02703
25170.00.02449
29900.00.0221
35530.00.01988
42220.00.01782
50170.00.01592
59610.00.01419
70830.00.01261
84160.00.01118

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]
Coefficients
Fit range

E = 21.38 – 100000