{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Ga", "surface_phase": "pc", "species": {"text": "T+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
------------------------------------------------------------------------
Sputtering of T+ on Ga(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.2369, "q": 0.1706, "mu": 1.451, "epsilonL": 0.0003051, "Eth": 21.38}, "E_min": 21.38, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
21.38	0.0	
25.4	0.0002995	
30.18	0.001081	
35.86	0.002533	
42.61	0.004898	
50.63	0.00838	
60.17	0.01304	
71.49	0.0187	
84.95	0.02497	
100.9	0.03136	
119.9	0.03741	
142.5	0.04285	
169.3	0.04757	
201.2	0.05159	
239.1	0.05498	
284.1	0.05782	
337.5	0.06019	
401.1	0.06214	
476.6	0.06371	
566.3	0.06494	
672.9	0.06581	
799.5	0.06635	
950.0	0.06655	
1129.0	0.06639	
1341.0	0.06589	
1594.0	0.06504	
1894.0	0.06384	
2250.0	0.0623	
2674.0	0.06045	
3177.0	0.0583	
3775.0	0.0559	
4486.0	0.05328	
5330.0	0.05048	
6333.0	0.04756	
7525.0	0.04455	
8942.0	0.0415	
10620.0	0.03846	
12620.0	0.03546	
15000.0	0.03254	
17820.0	0.02972	
21180.0	0.02703	
25170.0	0.02449	
29900.0	0.0221	
35530.0	0.01988	
42220.0	0.01782	
50170.0	0.01592	
59610.0	0.01419	
70830.0	0.01261	
84160.0	0.01118	
-----