pwiDB

Plasma-Surface Interaction Data Set 306

Sputtering of Kr⁺ on Zn(pc) at 300 K

B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of Kr⁺ on Zn(pc) at 300 K

angle = 0.0 deg	E /eV	P
	6.916	5.198e-42
	8.409	2.457e-05
	10.22	0.0002083
	12.43	0.0008799
	15.12	0.0028
	18.38	0.007618
	22.35	0.01866
	27.17	0.04204
	33.04	0.08739
	40.18	0.1664
	48.85	0.2869
	59.4	0.4457
	72.22	0.6283
	87.82	0.8188
	106.8	1.008
	129.8	1.196
	157.9	1.386
	191.9	1.583
	233.4	1.791
	283.8	2.012
	345.0	2.251
	419.5	2.509
	510.1	2.787
	620.3	3.087
	754.2	3.41
	917.0	3.755
	1115.0	4.124
	1356.0	4.516
	1648.0	4.93
	2004.0	5.365
	2437.0	5.82
	2963.0	6.294
	3603.0	6.783
	4381.0	7.286
	5327.0	7.799
	6477.0	8.319
	7876.0	8.841
	9576.0	9.361
	11640.0	9.875
	14160.0	10.38
	17210.0	10.86
	20930.0	11.32
	25450.0	11.75
	30950.0	12.14
	37630.0	12.49
	45750.0	12.79
	55630.0	13.04
	67640.0	13.21
	82240.0	13.32

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]

Coefficients

lambda = 0.4951
q = 34.13
mu = 2.441
epsilonL = 2.912e-06
Eth = 6.916

Fit range

E = 6.916 – 100000