{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Zn", "surface_phase": "pc", "species": {"text": "Kr+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
------------------------------------------------------------------------
Sputtering of Kr+ on Zn(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.4951, "q": 34.13, "mu": 2.441, "epsilonL": 2.912e-06, "Eth": 6.916}, "E_min": 6.916, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
6.916	5.198e-42	
8.409	2.457e-05	
10.22	0.0002083	
12.43	0.0008799	
15.12	0.0028	
18.38	0.007618	
22.35	0.01866	
27.17	0.04204	
33.04	0.08739	
40.18	0.1664	
48.85	0.2869	
59.4	0.4457	
72.22	0.6283	
87.82	0.8188	
106.8	1.008	
129.8	1.196	
157.9	1.386	
191.9	1.583	
233.4	1.791	
283.8	2.012	
345.0	2.251	
419.5	2.509	
510.1	2.787	
620.3	3.087	
754.2	3.41	
917.0	3.755	
1115.0	4.124	
1356.0	4.516	
1648.0	4.93	
2004.0	5.365	
2437.0	5.82	
2963.0	6.294	
3603.0	6.783	
4381.0	7.286	
5327.0	7.799	
6477.0	8.319	
7876.0	8.841	
9576.0	9.361	
11640.0	9.875	
14160.0	10.38	
17210.0	10.86	
20930.0	11.32	
25450.0	11.75	
30950.0	12.14	
37630.0	12.49	
45750.0	12.79	
55630.0	13.04	
67640.0	13.21	
82240.0	13.32	
-----