pwiDB

Plasma-Surface Interaction Data Set 305

Sputtering of Zn⁺ on Zn(pc) at 300 K

B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of Zn⁺ on Zn(pc) at 300 K

angle = 0.0 deg	E /eV	P
	6.583	0.0
	8.013	7.688e-05
	9.752	0.00051
	11.87	0.00184
	14.45	0.005175
	17.58	0.01266
	21.4	0.02815
	26.05	0.05797
	31.71	0.1109
	38.59	0.1964
	46.97	0.32
	57.17	0.4788
	69.58	0.6621
	84.69	0.8573
	103.1	1.056
	125.5	1.256
	152.7	1.459
	185.9	1.669
	226.2	1.888
	275.3	2.119
	335.1	2.367
	407.9	2.631
	496.4	2.914
	604.2	3.217
	735.4	3.54
	895.1	3.883
	1089.0	4.246
	1326.0	4.629
	1614.0	5.03
	1964.0	5.447
	2391.0	5.88
	2910.0	6.326
	3542.0	6.781
	4311.0	7.244
	5247.0	7.709
	6387.0	8.175
	7773.0	8.636
	9461.0	9.087
	11520.0	9.524
	14020.0	9.942
	17060.0	10.33
	20760.0	10.7
	25270.0	11.02
	30760.0	11.3
	37440.0	11.53
	45570.0	11.7
	55460.0	11.81
	67500.0	11.86
	82160.0	11.82

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]

Coefficients

lambda = 0.3077
q = 30.31
mu = 2.132
epsilonL = 4.113e-06
Eth = 6.583

Fit range

E = 6.583 – 100000