{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Zn", "surface_phase": "pc", "species": {"text": "Zn+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
------------------------------------------------------------------------
Sputtering of Zn+ on Zn(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.3077, "q": 30.31, "mu": 2.132, "epsilonL": 4.113e-06, "Eth": 6.583}, "E_min": 6.583, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
6.583	0.0	
8.013	7.688e-05	
9.752	0.00051	
11.87	0.00184	
14.45	0.005175	
17.58	0.01266	
21.4	0.02815	
26.05	0.05797	
31.71	0.1109	
38.59	0.1964	
46.97	0.32	
57.17	0.4788	
69.58	0.6621	
84.69	0.8573	
103.1	1.056	
125.5	1.256	
152.7	1.459	
185.9	1.669	
226.2	1.888	
275.3	2.119	
335.1	2.367	
407.9	2.631	
496.4	2.914	
604.2	3.217	
735.4	3.54	
895.1	3.883	
1089.0	4.246	
1326.0	4.629	
1614.0	5.03	
1964.0	5.447	
2391.0	5.88	
2910.0	6.326	
3542.0	6.781	
4311.0	7.244	
5247.0	7.709	
6387.0	8.175	
7773.0	8.636	
9461.0	9.087	
11520.0	9.524	
14020.0	9.942	
17060.0	10.33	
20760.0	10.7	
25270.0	11.02	
30760.0	11.3	
37440.0	11.53	
45570.0	11.7	
55460.0	11.81	
67500.0	11.86	
82160.0	11.82	
-----