pwiDB

Plasma-Surface Interaction Data Set 304

Sputtering of Ar⁺ on Zn(pc) at 300 K

B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of Ar⁺ on Zn(pc) at 300 K

angle = 0.0 deg	E /eV	P
	7.606	4.168e-35
	9.23	0.0001559
	11.2	0.0009518
	13.59	0.00325
	16.5	0.008757
	20.02	0.02069
	24.29	0.04482
	29.48	0.09072
	35.78	0.1727
	43.42	0.3088
	52.69	0.5154
	63.94	0.7984
	77.6	1.147
	94.17	1.535
	114.3	1.939
	138.7	2.341
	168.3	2.737
	204.2	3.129
	247.9	3.523
	300.8	3.924
	365.0	4.337
	443.0	4.764
	537.6	5.209
	652.4	5.672
	791.7	6.152
	960.7	6.649
	1166.0	7.16
	1415.0	7.685
	1717.0	8.219
	2084.0	8.759
	2529.0	9.3
	3069.0	9.84
	3724.0	10.37
	4519.0	10.89
	5484.0	11.39
	6656.0	11.87
	8077.0	12.31
	9802.0	12.72
	11890.0	13.09
	14440.0	13.4
	17520.0	13.65
	21260.0	13.83
	25800.0	13.95
	31310.0	13.98
	37990.0	13.93
	46110.0	13.79
	55950.0	13.56
	67900.0	13.24
	82400.0	12.84

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]

Coefficients

lambda = 0.5168
q = 35.75
mu = 2.035
epsilonL = 9.2e-06
Eth = 7.606

Fit range

E = 7.606 – 100000