{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Zn", "surface_phase": "pc", "species": {"text": "Ar+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
------------------------------------------------------------------------
Sputtering of Ar+ on Zn(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.5168, "q": 35.75, "mu": 2.035, "epsilonL": 9.2e-06, "Eth": 7.606}, "E_min": 7.606, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
7.606	4.168e-35	
9.23	0.0001559	
11.2	0.0009518	
13.59	0.00325	
16.5	0.008757	
20.02	0.02069	
24.29	0.04482	
29.48	0.09072	
35.78	0.1727	
43.42	0.3088	
52.69	0.5154	
63.94	0.7984	
77.6	1.147	
94.17	1.535	
114.3	1.939	
138.7	2.341	
168.3	2.737	
204.2	3.129	
247.9	3.523	
300.8	3.924	
365.0	4.337	
443.0	4.764	
537.6	5.209	
652.4	5.672	
791.7	6.152	
960.7	6.649	
1166.0	7.16	
1415.0	7.685	
1717.0	8.219	
2084.0	8.759	
2529.0	9.3	
3069.0	9.84	
3724.0	10.37	
4519.0	10.89	
5484.0	11.39	
6656.0	11.87	
8077.0	12.31	
9802.0	12.72	
11890.0	13.09	
14440.0	13.4	
17520.0	13.65	
21260.0	13.83	
25800.0	13.95	
31310.0	13.98	
37990.0	13.93	
46110.0	13.79	
55950.0	13.56	
67900.0	13.24	
82400.0	12.84	
-----