pwiDB

Plasma-Surface Interaction Data Set 303

Sputtering of Xe⁺ on Cu(pc) at 300 K

B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of Xe⁺ on Cu(pc) at 300 K

angle = 0.0 deg	E /eV	P
	23.63	1.572e-38
	28.02	4.858e-05
	33.22	0.0003315
	39.39	0.001192
	46.71	0.003297
	55.39	0.007886
	65.69	0.01713
	77.89	0.03453
	92.36	0.06519
	109.5	0.1152
	129.9	0.19
	154.0	0.2911
	182.6	0.4147
	216.6	0.5528
	256.8	0.697
	304.5	0.8422
	361.1	0.9865
	428.2	1.131
	507.7	1.277
	602.0	1.428
	713.9	1.585
	846.6	1.75
	1004.0	1.924
	1190.0	2.109
	1412.0	2.305
	1674.0	2.513
	1985.0	2.733
	2354.0	2.966
	2791.0	3.211
	3309.0	3.468
	3924.0	3.736
	4653.0	4.016
	5518.0	4.306
	6543.0	4.605
	7759.0	4.913
	9201.0	5.228
	10910.0	5.548
	12940.0	5.872
	15340.0	6.198
	18190.0	6.524
	21570.0	6.848
	25580.0	7.167
	30330.0	7.478
	35970.0	7.78
	42650.0	8.069
	50580.0	8.342
	59970.0	8.596
	71120.0	8.828
	84330.0	9.034

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]

Coefficients

lambda = 0.2781
q = 24.46
mu = 2.239
epsilonL = 1.391e-06
Eth = 23.63

Fit range

E = 23.63 – 100000