pwiDB

Plasma-Surface Interaction Data Set 302

Sputtering of Kr⁺ on Cu(pc) at 300 K

B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of Kr⁺ on Cu(pc) at 300 K

angle = 0.0 deg	E /eV	P
	21.35	0.0
	25.37	5.167e-05
	30.14	0.0003789
	35.82	0.001428
	42.56	0.004098
	50.57	0.0101
	60.09	0.02244
	71.41	0.04592
	84.85	0.08707
	100.8	0.1526
	119.8	0.2458
	142.4	0.3637
	169.2	0.4971
	201.0	0.6357
	238.8	0.7727
	283.8	0.9057
	337.2	1.036
	400.7	1.165
	476.2	1.297
	565.8	1.432
	672.3	1.573
	798.9	1.72
	949.3	1.875
	1128.0	2.038
	1340.0	2.208
	1593.0	2.387
	1893.0	2.574
	2249.0	2.768
	2672.0	2.969
	3175.0	3.176
	3773.0	3.389
	4483.0	3.607
	5327.0	3.828
	6330.0	4.051
	7522.0	4.275
	8938.0	4.499
	10620.0	4.721
	12620.0	4.939
	15000.0	5.151
	17820.0	5.356
	21170.0	5.551
	25160.0	5.734
	29900.0	5.903
	35520.0	6.056
	42210.0	6.19
	50160.0	6.303
	59600.0	6.392
	70820.0	6.456
	84160.0	6.492

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]

Coefficients

lambda = 0.3072
q = 16.62
mu = 2.326
epsilonL = 2.98e-06
Eth = 21.35

Fit range

E = 21.35 – 100000