{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Cu", "surface_phase": "pc", "species": {"text": "Kr+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
------------------------------------------------------------------------
Sputtering of Kr+ on Cu(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.3072, "q": 16.62, "mu": 2.326, "epsilonL": 2.98e-06, "Eth": 21.35}, "E_min": 21.35, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
21.35	0.0	
25.37	5.167e-05	
30.14	0.0003789	
35.82	0.001428	
42.56	0.004098	
50.57	0.0101	
60.09	0.02244	
71.41	0.04592	
84.85	0.08707	
100.8	0.1526	
119.8	0.2458	
142.4	0.3637	
169.2	0.4971	
201.0	0.6357	
238.8	0.7727	
283.8	0.9057	
337.2	1.036	
400.7	1.165	
476.2	1.297	
565.8	1.432	
672.3	1.573	
798.9	1.72	
949.3	1.875	
1128.0	2.038	
1340.0	2.208	
1593.0	2.387	
1893.0	2.574	
2249.0	2.768	
2672.0	2.969	
3175.0	3.176	
3773.0	3.389	
4483.0	3.607	
5327.0	3.828	
6330.0	4.051	
7522.0	4.275	
8938.0	4.499	
10620.0	4.721	
12620.0	4.939	
15000.0	5.151	
17820.0	5.356	
21170.0	5.551	
25160.0	5.734	
29900.0	5.903	
35520.0	6.056	
42210.0	6.19	
50160.0	6.303	
59600.0	6.392	
70820.0	6.456	
84160.0	6.492	
-----