pwiDB

Plasma-Surface Interaction Data Set 300

Sputtering of Ar⁺ on Cu(pc) at 300 K

B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of Ar⁺ on Cu(pc) at 300 K

angle = 0.0 deg	E /eV	P
	12.92	0.0
	15.51	1.484e-05
	18.62	0.0001173
	22.35	0.0004693
	26.83	0.001424
	32.21	0.003718
	38.67	0.008826
	46.42	0.01956
	55.73	0.04096
	66.9	0.08132
	80.31	0.1523
	96.42	0.2662
	115.7	0.4296
	139.0	0.6357
	166.8	0.8652
	200.3	1.097
	240.4	1.318
	288.6	1.526
	346.5	1.722
	416.0	1.912
	499.4	2.1
	599.5	2.29
	719.7	2.482
	864.0	2.678
	1037.0	2.879
	1245.0	3.084
	1495.0	3.293
	1795.0	3.504
	2155.0	3.717
	2587.0	3.93
	3105.0	4.141
	3728.0	4.349
	4475.0	4.553
	5372.0	4.749
	6450.0	4.936
	7743.0	5.111
	9295.0	5.273
	11160.0	5.418
	13400.0	5.545
	16080.0	5.65
	19310.0	5.732
	23180.0	5.787
	27830.0	5.814
	33410.0	5.81
	40100.0	5.774
	48140.0	5.705
	57800.0	5.603
	69390.0	5.469
	83300.0	5.303

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]

Coefficients

lambda = 1.942
q = 14.87
mu = 2.391
epsilonL = 9.476e-06
Eth = 12.92

Fit range

E = 12.92 – 100000