{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Cu", "surface_phase": "pc", "species": {"text": "Ar+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
------------------------------------------------------------------------
Sputtering of Ar+ on Cu(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 1.942, "q": 14.87, "mu": 2.391, "epsilonL": 9.476e-06, "Eth": 12.92}, "E_min": 12.92, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
12.92	0.0	
15.51	1.484e-05	
18.62	0.0001173	
22.35	0.0004693	
26.83	0.001424	
32.21	0.003718	
38.67	0.008826	
46.42	0.01956	
55.73	0.04096	
66.9	0.08132	
80.31	0.1523	
96.42	0.2662	
115.7	0.4296	
139.0	0.6357	
166.8	0.8652	
200.3	1.097	
240.4	1.318	
288.6	1.526	
346.5	1.722	
416.0	1.912	
499.4	2.1	
599.5	2.29	
719.7	2.482	
864.0	2.678	
1037.0	2.879	
1245.0	3.084	
1495.0	3.293	
1795.0	3.504	
2155.0	3.717	
2587.0	3.93	
3105.0	4.141	
3728.0	4.349	
4475.0	4.553	
5372.0	4.749	
6450.0	4.936	
7743.0	5.111	
9295.0	5.273	
11160.0	5.418	
13400.0	5.545	
16080.0	5.65	
19310.0	5.732	
23180.0	5.787	
27830.0	5.814	
33410.0	5.81	
40100.0	5.774	
48140.0	5.705	
57800.0	5.603	
69390.0	5.469	
83300.0	5.303	
-----