pwiDB

Plasma-Surface Interaction Data Set 299

Sputtering of Ne⁺ on Cu(pc) at 300 K

B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of Ne⁺ on Cu(pc) at 300 K

angle = 0.0 deg	E /eV	P
	15.58	0.0
	18.63	0.0001299
	22.28	0.001023
	26.65	0.004032
	31.87	0.01186
	38.11	0.02923
	45.58	0.06263
	54.51	0.1177
	65.19	0.1941
	77.96	0.2834
	93.24	0.3743
	111.5	0.4591
	133.4	0.5362
	159.5	0.607
	190.7	0.6739
	228.1	0.739
	272.8	0.8037
	326.2	0.869
	390.1	0.9354
	466.6	1.003
	558.0	1.072
	667.3	1.141
	798.0	1.212
	954.4	1.282
	1141.0	1.353
	1365.0	1.423
	1632.0	1.492
	1952.0	1.558
	2335.0	1.623
	2792.0	1.684
	3339.0	1.742
	3993.0	1.794
	4776.0	1.842
	5712.0	1.883
	6831.0	1.917
	8169.0	1.943
	9769.0	1.961
	11680.0	1.97
	13970.0	1.968
	16710.0	1.956
	19980.0	1.934
	23900.0	1.9
	28580.0	1.857
	34180.0	1.802
	40880.0	1.739
	48890.0	1.667
	58460.0	1.588
	69920.0	1.503
	83620.0	1.414

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]

Coefficients

lambda = 0.2009
q = 5.038
mu = 2.401
epsilonL = 2.269e-05
Eth = 15.58

Fit range

E = 15.58 – 100000