{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Cu", "surface_phase": "pc", "species": {"text": "Ne+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
------------------------------------------------------------------------
Sputtering of Ne+ on Cu(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.2009, "q": 5.038, "mu": 2.401, "epsilonL": 2.269e-05, "Eth": 15.58}, "E_min": 15.58, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
15.58	0.0	
18.63	0.0001299	
22.28	0.001023	
26.65	0.004032	
31.87	0.01186	
38.11	0.02923	
45.58	0.06263	
54.51	0.1177	
65.19	0.1941	
77.96	0.2834	
93.24	0.3743	
111.5	0.4591	
133.4	0.5362	
159.5	0.607	
190.7	0.6739	
228.1	0.739	
272.8	0.8037	
326.2	0.869	
390.1	0.9354	
466.6	1.003	
558.0	1.072	
667.3	1.141	
798.0	1.212	
954.4	1.282	
1141.0	1.353	
1365.0	1.423	
1632.0	1.492	
1952.0	1.558	
2335.0	1.623	
2792.0	1.684	
3339.0	1.742	
3993.0	1.794	
4776.0	1.842	
5712.0	1.883	
6831.0	1.917	
8169.0	1.943	
9769.0	1.961	
11680.0	1.97	
13970.0	1.968	
16710.0	1.956	
19980.0	1.934	
23900.0	1.9	
28580.0	1.857	
34180.0	1.802	
40880.0	1.739	
48890.0	1.667	
58460.0	1.588	
69920.0	1.503	
83620.0	1.414	
-----