pwiDB

Plasma-Surface Interaction Data Set 297

Sputtering of ⁴He⁺ on Cu(pc) at 300 K

B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of ⁴He⁺ on Cu(pc) at 300 K

angle = 0.0 deg	E /eV	P
	21.52	0.0
	25.57	0.0003449
	30.38	0.001918
	36.09	0.005904
	42.88	0.0139
	50.94	0.02735
	60.53	0.04645
	71.91	0.06941
	85.43	0.09316
	101.5	0.1151
	120.6	0.1342
	143.3	0.1502
	170.2	0.1639
	202.2	0.1758
	240.2	0.1863
	285.4	0.1958
	339.1	0.2046
	402.9	0.2126
	478.6	0.2199
	568.6	0.2266
	675.6	0.2326
	802.6	0.2377
	953.6	0.242
	1133.0	0.2454
	1346.0	0.2478
	1599.0	0.2491
	1900.0	0.2493
	2257.0	0.2482
	2682.0	0.2459
	3186.0	0.2423
	3785.0	0.2375
	4497.0	0.2314
	5342.0	0.2242
	6347.0	0.2159
	7541.0	0.2068
	8959.0	0.1968
	10640.0	0.1862
	12650.0	0.1752
	15020.0	0.1639
	17850.0	0.1525
	21210.0	0.1412
	25190.0	0.13
	29930.0	0.1192
	35560.0	0.1088
	42250.0	0.09888
	50190.0	0.08951
	59630.0	0.08072
	70850.0	0.07255
	84170.0	0.065

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]

Coefficients

lambda = 0.1639
q = 0.6376
mu = 1.994
epsilonL = 0.0001589
Eth = 21.52

Fit range

E = 21.52 – 100000