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Plasma-Surface Interaction Data Set 296

Sputtering of 3He+ on Cu(pc) at 300 K

  1. B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of 3He+ on Cu(pc) at 300 K

angle = 0.0 deg E /eV P
28.480.0
33.640.005175
39.740.01276
46.940.02297
55.450.03588
65.50.0513
77.380.06874
91.410.08751
108.00.1068
127.60.126
150.70.1445
178.00.162
210.30.1782
248.40.193
293.40.2065
346.60.2188
409.40.2299
483.70.2397
571.40.2485
675.00.2562
797.30.2627
941.90.2682
1113.00.2724
1314.00.2755
1553.00.2774
1834.00.2779
2167.00.2771
2559.00.275
3023.00.2715
3571.00.2667
4219.00.2606
4984.00.2532
5887.00.2446
6955.00.2351
8216.00.2247
9705.00.2135
11460.00.2018
13540.00.1897
16000.00.1775
18900.00.1652
22320.00.153
26370.00.1411
31150.00.1295
36800.00.1184
43470.00.1078
51350.00.09784
60660.00.08849
71660.00.07977
84650.00.07169

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]
Coefficients
Fit range

E = 28.48 – 100000