{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Cu", "surface_phase": "pc", "species": {"text": "(3He)+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
------------------------------------------------------------------------
Sputtering of (3He)+ on Cu(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.075, "q": 0.7126, "mu": 1.03, "epsilonL": 0.0001613, "Eth": 28.48}, "E_min": 28.48, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
28.48	0.0	
33.64	0.005175	
39.74	0.01276	
46.94	0.02297	
55.45	0.03588	
65.5	0.0513	
77.38	0.06874	
91.41	0.08751	
108.0	0.1068	
127.6	0.126	
150.7	0.1445	
178.0	0.162	
210.3	0.1782	
248.4	0.193	
293.4	0.2065	
346.6	0.2188	
409.4	0.2299	
483.7	0.2397	
571.4	0.2485	
675.0	0.2562	
797.3	0.2627	
941.9	0.2682	
1113.0	0.2724	
1314.0	0.2755	
1553.0	0.2774	
1834.0	0.2779	
2167.0	0.2771	
2559.0	0.275	
3023.0	0.2715	
3571.0	0.2667	
4219.0	0.2606	
4984.0	0.2532	
5887.0	0.2446	
6955.0	0.2351	
8216.0	0.2247	
9705.0	0.2135	
11460.0	0.2018	
13540.0	0.1897	
16000.0	0.1775	
18900.0	0.1652	
22320.0	0.153	
26370.0	0.1411	
31150.0	0.1295	
36800.0	0.1184	
43470.0	0.1078	
51350.0	0.09784	
60660.0	0.08849	
71660.0	0.07977	
84650.0	0.07169	
-----