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Plasma-Surface Interaction Data Set 295

Sputtering of T+ on Cu(pc) at 300 K

  1. B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of T+ on Cu(pc) at 300 K

angle = 0.0 deg E /eV P
24.290.0
28.790.0002108
34.120.001141
40.430.003453
47.920.008038
56.790.01572
67.30.02664
79.760.03978
94.530.05331
112.00.0656
132.80.07588
157.30.08413
186.50.0907
221.00.09596
261.90.1003
310.40.1038
367.90.1067
436.00.109
516.70.1109
612.30.1122
725.70.113
860.00.1133
1019.00.113
1208.00.1122
1432.00.1108
1697.00.1089
2011.00.1064
2383.00.1034
2824.00.09986
3347.00.09592
3967.00.09161
4701.00.08699
5571.00.08214
6603.00.07713
7825.00.07204
9274.00.06694
10990.00.06189
13030.00.05695
15440.00.05217
18290.00.04759
21680.00.04324
25700.00.03914
30450.00.03531
36090.00.03175
42770.00.02846
50690.00.02543
60080.00.02267
71200.00.02016
84380.00.01789

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]
Coefficients
Fit range

E = 24.29 – 100000