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Plasma-Surface Interaction Data Set 294

Sputtering of D+ on Cu(pc) at 300 K

  1. B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of D+ on Cu(pc) at 300 K

angle = 0.0 deg E /eV P
35.564.488e-29
41.820.0003251
49.170.001348
57.830.003372
68.00.006679
79.970.01133
94.040.01701
110.60.02313
130.00.02902
152.90.03424
179.80.03862
211.50.04218
248.70.04505
292.40.04734
343.90.04917
404.40.05063
475.50.05177
559.20.05261
657.60.05319
773.30.05351
909.40.05358
1069.00.0534
1258.00.05296
1479.00.05227
1739.00.05133
2045.00.05016
2405.00.04876
2828.00.04715
3325.00.04536
3910.00.04341
4599.00.04132
5408.00.03913
6359.00.03687
7478.00.03457
8794.00.03226
10340.00.02997
12160.00.02772
14300.00.02553
16820.00.02343
19770.00.02141
23250.00.0195
27350.00.01771
32160.00.01603
37820.00.01446
44470.00.01302
52290.00.01169
61490.00.01047
72310.00.009352
85040.00.008339

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]
Coefficients
Fit range

E = 35.56 – 100000