{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Cu", "surface_phase": "pc", "species": {"text": "D+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
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Sputtering of D+ on Cu(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.1989, "q": 0.1374, "mu": 1.664, "epsilonL": 0.0003366, "Eth": 35.56}, "E_min": 35.56, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
35.56	4.488e-29	
41.82	0.0003251	
49.17	0.001348	
57.83	0.003372	
68.0	0.006679	
79.97	0.01133	
94.04	0.01701	
110.6	0.02313	
130.0	0.02902	
152.9	0.03424	
179.8	0.03862	
211.5	0.04218	
248.7	0.04505	
292.4	0.04734	
343.9	0.04917	
404.4	0.05063	
475.5	0.05177	
559.2	0.05261	
657.6	0.05319	
773.3	0.05351	
909.4	0.05358	
1069.0	0.0534	
1258.0	0.05296	
1479.0	0.05227	
1739.0	0.05133	
2045.0	0.05016	
2405.0	0.04876	
2828.0	0.04715	
3325.0	0.04536	
3910.0	0.04341	
4599.0	0.04132	
5408.0	0.03913	
6359.0	0.03687	
7478.0	0.03457	
8794.0	0.03226	
10340.0	0.02997	
12160.0	0.02772	
14300.0	0.02553	
16820.0	0.02343	
19770.0	0.02141	
23250.0	0.0195	
27350.0	0.01771	
32160.0	0.01603	
37820.0	0.01446	
44470.0	0.01302	
52290.0	0.01169	
61490.0	0.01047	
72310.0	0.009352	
85040.0	0.008339	
-----