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Plasma-Surface Interaction Data Set 293

Sputtering of H+ on Cu(pc) at 300 K

  1. B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of H+ on Cu(pc) at 300 K

angle = 0.0 deg E /eV P
61.720.0
71.774.498e-05
83.450.0002394
97.040.0007093
112.80.001623
131.20.003146
152.60.005342
177.40.008071
206.30.011
239.90.01374
278.90.01606
324.30.01787
377.10.01924
438.50.02023
509.90.02094
592.90.02143
689.40.02175
801.60.02192
932.10.02198
1084.00.02192
1260.00.02176
1465.00.0215
1704.00.02115
1981.00.02071
2304.00.02019
2679.00.01959
3115.00.01892
3622.00.01819
4212.00.01741
4898.00.01659
5695.00.01574
6622.00.01486
7700.00.01398
8953.00.0131
10410.00.01222
12110.00.01136
14080.00.01052
16370.00.009711
19030.00.008936
22130.00.008197
25730.00.007497
29920.00.006838
34790.00.006222
40460.00.005647
47040.00.005114
54700.00.004621
63610.00.004167
73960.00.003751
86000.00.003371

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]
Coefficients
Fit range

E = 61.72 – 100000