pwiDB

Plasma-Surface Interaction Data Set 292

Sputtering of Xe⁺ on Ni(pc) at 300 K

B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of Xe⁺ on Ni(pc) at 300 K

angle = 0.0 deg	E /eV	P
	21.27	2.653e-41
	25.27	6.356e-06
	30.03	4.812e-05
	35.69	0.0001855
	42.41	0.0005441
	50.4	0.001376
	59.89	0.003168
	71.17	0.00683
	84.58	0.014
	100.5	0.02745
	119.4	0.05153
	141.9	0.09224
	168.7	0.1562
	200.4	0.2482
	238.2	0.3675
	283.1	0.5073
	336.4	0.6578
	399.7	0.8106
	475.0	0.9614
	564.5	1.11
	670.8	1.258
	797.2	1.408
	947.3	1.563
	1126.0	1.724
	1338.0	1.893
	1590.0	2.071
	1889.0	2.259
	2245.0	2.457
	2668.0	2.665
	3170.0	2.884
	3767.0	3.113
	4477.0	3.352
	5320.0	3.6
	6322.0	3.857
	7513.0	4.121
	8928.0	4.391
	10610.0	4.667
	12610.0	4.947
	14980.0	5.228
	17810.0	5.51
	21160.0	5.79
	25140.0	6.067
	29880.0	6.337
	35510.0	6.599
	42200.0	6.851
	50140.0	7.089
	59590.0	7.311
	70810.0	7.513
	84150.0	7.694

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]

Coefficients

lambda = 1.349
q = 20.87
mu = 2.365
epsilonL = 1.371e-06
Eth = 21.27

Fit range

E = 21.27 – 100000