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Plasma-Surface Interaction Data Set 291

Sputtering of Kr+ on Ni(pc) at 300 K

  1. B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of Kr+ on Ni(pc) at 300 K

angle = 0.0 deg E /eV P
18.156.361e-45
21.643.81e-06
25.83.471e-05
30.760.000151
36.670.0004868
43.710.001334
52.120.003301
62.130.007593
74.080.01649
88.310.03396
105.30.06613
125.50.1206
149.60.2036
178.40.3146
212.70.4449
253.60.5817
302.30.7156
360.40.8432
429.70.9655
512.31.085
610.81.206
728.11.329
868.11.456
1035.01.589
1234.01.728
1471.01.874
1754.02.026
2091.02.185
2493.02.349
2972.02.52
3543.02.695
4224.02.874
5036.03.057
6004.03.242
7157.03.429
8533.03.615
10170.03.8
12130.03.982
14460.04.16
17240.04.332
20550.04.495
24500.04.65
29210.04.793
34830.04.922
41520.05.036
49500.05.132
59010.05.208
70360.05.263
83880.05.294

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]
Coefficients
Fit range

E = 18.15 – 100000