{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Ni", "surface_phase": "pc", "species": {"text": "Kr+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
------------------------------------------------------------------------
Sputtering of Kr+ on Ni(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 1.954, "q": 13.55, "mu": 2.591, "epsilonL": 2.964e-06, "Eth": 18.15}, "E_min": 18.15, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
18.15	6.361e-45	
21.64	3.81e-06	
25.8	3.471e-05	
30.76	0.000151	
36.67	0.0004868	
43.71	0.001334	
52.12	0.003301	
62.13	0.007593	
74.08	0.01649	
88.31	0.03396	
105.3	0.06613	
125.5	0.1206	
149.6	0.2036	
178.4	0.3146	
212.7	0.4449	
253.6	0.5817	
302.3	0.7156	
360.4	0.8432	
429.7	0.9655	
512.3	1.085	
610.8	1.206	
728.1	1.329	
868.1	1.456	
1035.0	1.589	
1234.0	1.728	
1471.0	1.874	
1754.0	2.026	
2091.0	2.185	
2493.0	2.349	
2972.0	2.52	
3543.0	2.695	
4224.0	2.874	
5036.0	3.057	
6004.0	3.242	
7157.0	3.429	
8533.0	3.615	
10170.0	3.8	
12130.0	3.982	
14460.0	4.16	
17240.0	4.332	
20550.0	4.495	
24500.0	4.65	
29210.0	4.793	
34830.0	4.922	
41520.0	5.036	
49500.0	5.132	
59010.0	5.208	
70360.0	5.263	
83880.0	5.294	
-----