pwiDB

Plasma-Surface Interaction Data Set 290

Sputtering of Ni⁺ on Ni(pc) at 300 K

B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of Ni⁺ on Ni(pc) at 300 K

angle = 0.0 deg	E /eV	P
	11.75	1.455e-48
	14.13	8.833e-07
	16.99	9.602e-06
	20.44	4.717e-05
	24.59	0.0001681
	29.58	0.0005041
	35.57	0.001357
	42.79	0.003391
	51.47	0.008009
	61.91	0.01802
	74.47	0.03858
	89.57	0.07795
	107.7	0.1462
	129.6	0.2495
	155.9	0.383
	187.5	0.5308
	225.5	0.6767
	271.3	0.8131
	326.3	0.9403
	392.5	1.062
	472.1	1.183
	567.8	1.305
	683.0	1.432
	821.6	1.563
	988.2	1.7
	1189.0	1.843
	1430.0	1.992
	1720.0	2.146
	2069.0	2.305
	2488.0	2.469
	2993.0	2.636
	3600.0	2.805
	4330.0	2.975
	5208.0	3.146
	6265.0	3.315
	7536.0	3.482
	9064.0	3.644
	10900.0	3.801
	13110.0	3.949
	15770.0	4.088
	18970.0	4.215
	22820.0	4.329
	27450.0	4.426
	33020.0	4.507
	39720.0	4.567
	47770.0	4.605
	57460.0	4.62
	69120.0	4.61
	83140.0	4.573

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]

Coefficients

lambda = 6.57
q = 11.81
mu = 2.788
epsilonL = 4.832e-06
Eth = 11.75

Fit range

E = 11.75 – 100000