pwiDB

Plasma-Surface Interaction Data Set 289

Sputtering of Ar⁺ on Ni(pc) at 300 K

B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of Ar⁺ on Ni(pc) at 300 K

angle = 0.0 deg	E /eV	P
	23.31	2.444e-39
	27.65	8.671e-05
	32.79	0.0006253
	38.89	0.002324
	46.13	0.006573
	54.72	0.01591
	64.91	0.0345
	76.99	0.06826
	91.32	0.1235
	108.3	0.2036
	128.5	0.3058
	152.4	0.4208
	180.8	0.538
	214.4	0.6504
	254.3	0.7556
	301.6	0.8547
	357.8	0.9497
	424.4	1.043
	503.4	1.136
	597.1	1.23
	708.2	1.325
	840.0	1.423
	996.3	1.523
	1182.0	1.625
	1402.0	1.729
	1663.0	1.834
	1972.0	1.94
	2339.0	2.046
	2775.0	2.153
	3291.0	2.258
	3904.0	2.361
	4630.0	2.462
	5492.0	2.559
	6514.0	2.652
	7727.0	2.739
	9165.0	2.82
	10870.0	2.893
	12890.0	2.957
	15290.0	3.012
	18140.0	3.056
	21520.0	3.088
	25520.0	3.107
	30270.0	3.112
	35910.0	3.102
	42590.0	3.077
	50520.0	3.037
	59920.0	2.981
	71080.0	2.91
	84310.0	2.825

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]

Coefficients

lambda = 0.3068
q = 7.957
mu = 2.31
epsilonL = 9.577e-06
Eth = 23.31

Fit range

E = 23.31 – 100000