{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Ni", "surface_phase": "pc", "species": {"text": "Ar+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
------------------------------------------------------------------------
Sputtering of Ar+ on Ni(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.3068, "q": 7.957, "mu": 2.31, "epsilonL": 9.577e-06, "Eth": 23.31}, "E_min": 23.31, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
23.31	2.444e-39	
27.65	8.671e-05	
32.79	0.0006253	
38.89	0.002324	
46.13	0.006573	
54.72	0.01591	
64.91	0.0345	
76.99	0.06826	
91.32	0.1235	
108.3	0.2036	
128.5	0.3058	
152.4	0.4208	
180.8	0.538	
214.4	0.6504	
254.3	0.7556	
301.6	0.8547	
357.8	0.9497	
424.4	1.043	
503.4	1.136	
597.1	1.23	
708.2	1.325	
840.0	1.423	
996.3	1.523	
1182.0	1.625	
1402.0	1.729	
1663.0	1.834	
1972.0	1.94	
2339.0	2.046	
2775.0	2.153	
3291.0	2.258	
3904.0	2.361	
4630.0	2.462	
5492.0	2.559	
6514.0	2.652	
7727.0	2.739	
9165.0	2.82	
10870.0	2.893	
12890.0	2.957	
15290.0	3.012	
18140.0	3.056	
21520.0	3.088	
25520.0	3.107	
30270.0	3.112	
35910.0	3.102	
42590.0	3.077	
50520.0	3.037	
59920.0	2.981	
71080.0	2.91	
84310.0	2.825	
-----