pwiDB

Plasma-Surface Interaction Data Set 288

Sputtering of Ne⁺ on Ni(pc) at 300 K

B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of Ne⁺ on Ni(pc) at 300 K

angle = 0.0 deg	E /eV	P
	18.72	0.0
	22.3	0.0001085
	26.58	0.0008502
	31.66	0.003334
	37.72	0.00978
	44.95	0.02413
	53.55	0.05215
	63.8	0.09974
	76.02	0.1687
	90.57	0.2533
	107.9	0.3426
	128.6	0.4278
	153.2	0.505
	182.5	0.5749
	217.5	0.6395
	259.1	0.7011
	308.7	0.7613
	367.8	0.8211
	438.2	0.8812
	522.1	0.9419
	622.0	1.003
	741.1	1.065
	883.0	1.127
	1052.0	1.189
	1254.0	1.25
	1493.0	1.311
	1779.0	1.37
	2120.0	1.428
	2526.0	1.482
	3010.0	1.534
	3586.0	1.583
	4272.0	1.626
	5090.0	1.665
	6065.0	1.698
	7226.0	1.725
	8609.0	1.745
	10260.0	1.757
	12220.0	1.762
	14560.0	1.757
	17350.0	1.743
	20670.0	1.72
	24630.0	1.688
	29340.0	1.647
	34960.0	1.598
	41650.0	1.54
	49620.0	1.476
	59130.0	1.405
	70440.0	1.33
	83930.0	1.252

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]

Coefficients

lambda = 0.2478
q = 4.504
mu = 2.405
epsilonL = 2.323e-05
Eth = 18.72

Fit range

E = 18.72 – 100000