{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Ni", "surface_phase": "pc", "species": {"text": "Ne+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
------------------------------------------------------------------------
Sputtering of Ne+ on Ni(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.2478, "q": 4.504, "mu": 2.405, "epsilonL": 2.323e-05, "Eth": 18.72}, "E_min": 18.72, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
18.72	0.0	
22.3	0.0001085	
26.58	0.0008502	
31.66	0.003334	
37.72	0.00978	
44.95	0.02413	
53.55	0.05215	
63.8	0.09974	
76.02	0.1687	
90.57	0.2533	
107.9	0.3426	
128.6	0.4278	
153.2	0.505	
182.5	0.5749	
217.5	0.6395	
259.1	0.7011	
308.7	0.7613	
367.8	0.8211	
438.2	0.8812	
522.1	0.9419	
622.0	1.003	
741.1	1.065	
883.0	1.127	
1052.0	1.189	
1254.0	1.25	
1493.0	1.311	
1779.0	1.37	
2120.0	1.428	
2526.0	1.482	
3010.0	1.534	
3586.0	1.583	
4272.0	1.626	
5090.0	1.665	
6065.0	1.698	
7226.0	1.725	
8609.0	1.745	
10260.0	1.757	
12220.0	1.762	
14560.0	1.757	
17350.0	1.743	
20670.0	1.72	
24630.0	1.688	
29340.0	1.647	
34960.0	1.598	
41650.0	1.54	
49620.0	1.476	
59130.0	1.405	
70440.0	1.33	
83930.0	1.252	
-----