pwiDB

Plasma-Surface Interaction Data Set 286

Sputtering of N⁺ on Ni(pc) at 300 K

B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of N⁺ on Ni(pc) at 300 K

angle = 0.0 deg	E /eV	P
	18.44	0.0
	21.98	0.0002644
	26.2	0.001549
	31.22	0.00503
	37.21	0.01271
	44.35	0.02755
	52.86	0.05316
	63.0	0.09234
	75.08	0.145
	89.48	0.2074
	106.6	0.2731
	127.1	0.337
	151.5	0.3963
	180.5	0.4506
	215.2	0.5006
	256.4	0.5476
	305.6	0.5926
	364.2	0.6362
	434.1	0.6791
	517.4	0.7214
	616.6	0.7631
	734.9	0.8043
	875.8	0.8448
	1044.0	0.8843
	1244.0	0.9226
	1483.0	0.9594
	1767.0	0.9942
	2106.0	1.027
	2510.0	1.056
	2991.0	1.083
	3565.0	1.106
	4249.0	1.125
	5064.0	1.14
	6035.0	1.149
	7193.0	1.154
	8572.0	1.153
	10220.0	1.146
	12180.0	1.132
	14510.0	1.113
	17300.0	1.088
	20610.0	1.057
	24570.0	1.021
	29280.0	0.9801
	34890.0	0.935
	41590.0	0.8865
	49560.0	0.8355
	59070.0	0.7828
	70400.0	0.7292
	83910.0	0.6756

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]

Coefficients

lambda = 0.1941
q = 2.951
mu = 2.038
epsilonL = 3.734e-05
Eth = 18.44

Fit range

E = 18.44 – 100000