{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Ni", "surface_phase": "pc", "species": {"text": "N+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
------------------------------------------------------------------------
Sputtering of N+ on Ni(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.1941, "q": 2.951, "mu": 2.038, "epsilonL": 3.734e-05, "Eth": 18.44}, "E_min": 18.44, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
18.44	0.0	
21.98	0.0002644	
26.2	0.001549	
31.22	0.00503	
37.21	0.01271	
44.35	0.02755	
52.86	0.05316	
63.0	0.09234	
75.08	0.145	
89.48	0.2074	
106.6	0.2731	
127.1	0.337	
151.5	0.3963	
180.5	0.4506	
215.2	0.5006	
256.4	0.5476	
305.6	0.5926	
364.2	0.6362	
434.1	0.6791	
517.4	0.7214	
616.6	0.7631	
734.9	0.8043	
875.8	0.8448	
1044.0	0.8843	
1244.0	0.9226	
1483.0	0.9594	
1767.0	0.9942	
2106.0	1.027	
2510.0	1.056	
2991.0	1.083	
3565.0	1.106	
4249.0	1.125	
5064.0	1.14	
6035.0	1.149	
7193.0	1.154	
8572.0	1.153	
10220.0	1.146	
12180.0	1.132	
14510.0	1.113	
17300.0	1.088	
20610.0	1.057	
24570.0	1.021	
29280.0	0.9801	
34890.0	0.935	
41590.0	0.8865	
49560.0	0.8355	
59070.0	0.7828	
70400.0	0.7292	
83910.0	0.6756	
-----