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Plasma-Surface Interaction Data Set 285

Sputtering of 4He+ on Ni(pc) at 300 K

  1. B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of 4He+ on Ni(pc) at 300 K

angle = 0.0 deg E /eV P
25.385.38e-33
30.050.000218
35.580.001132
42.130.003338
49.880.007652
59.060.01488
69.940.02534
82.810.03838
98.050.05254
116.10.0662
137.50.07837
162.80.08876
192.70.09752
228.20.105
270.20.1114
320.00.1171
378.90.1221
448.60.1266
531.20.1307
629.00.1343
744.70.1374
881.80.14
1044.00.1421
1236.00.1436
1464.00.1445
1733.00.1448
2053.00.1444
2430.00.1434
2878.00.1416
3407.00.1391
4035.00.1359
4777.00.1321
5657.00.1276
6698.00.1226
7931.00.1171
9391.00.1113
11120.00.1051
13170.00.09873
15590.00.09226
18460.00.08578
21860.00.07935
25880.00.07307
30640.00.06699
36280.00.06115
42960.00.0556
50870.00.05037
60240.00.04547
71330.00.04092
84450.00.03671

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]
Coefficients
Fit range

E = 25.38 – 100000