{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Ni", "surface_phase": "pc", "species": {"text": "(4He)+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
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Sputtering of (4He)+ on Ni(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.2024, "q": 0.3704, "mu": 1.913, "epsilonL": 0.0001655, "Eth": 25.38}, "E_min": 25.38, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
25.38	5.38e-33	
30.05	0.000218	
35.58	0.001132	
42.13	0.003338	
49.88	0.007652	
59.06	0.01488	
69.94	0.02534	
82.81	0.03838	
98.05	0.05254	
116.1	0.0662	
137.5	0.07837	
162.8	0.08876	
192.7	0.09752	
228.2	0.105	
270.2	0.1114	
320.0	0.1171	
378.9	0.1221	
448.6	0.1266	
531.2	0.1307	
629.0	0.1343	
744.7	0.1374	
881.8	0.14	
1044.0	0.1421	
1236.0	0.1436	
1464.0	0.1445	
1733.0	0.1448	
2053.0	0.1444	
2430.0	0.1434	
2878.0	0.1416	
3407.0	0.1391	
4035.0	0.1359	
4777.0	0.1321	
5657.0	0.1276	
6698.0	0.1226	
7931.0	0.1171	
9391.0	0.1113	
11120.0	0.1051	
13170.0	0.09873	
15590.0	0.09226	
18460.0	0.08578	
21860.0	0.07935	
25880.0	0.07307	
30640.0	0.06699	
36280.0	0.06115	
42960.0	0.0556	
50870.0	0.05037	
60240.0	0.04547	
71330.0	0.04092	
84450.0	0.03671	
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