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Plasma-Surface Interaction Data Set 284

Sputtering of 3He+ on Ni(pc) at 300 K

  1. B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of 3He+ on Ni(pc) at 300 K

angle = 0.0 deg E /eV P
33.910.0
39.920.0008617
46.990.002817
55.310.006116
65.10.01105
76.630.01779
90.20.02621
106.20.0359
125.00.04626
147.10.05662
173.20.06646
203.80.07545
239.90.08346
282.40.09051
332.40.09668
391.30.1021
460.60.1067
542.10.1108
638.10.1143
751.10.1172
884.20.1197
1041.00.1216
1225.00.123
1442.00.1239
1697.00.1243
1998.00.124
2352.00.1232
2768.00.1218
3258.00.1199
3835.00.1174
4515.00.1143
5314.00.1107
6255.00.1067
7363.00.1023
8667.00.09756
10200.00.09254
12010.00.08733
14130.00.08199
16640.00.07661
19580.00.07125
23050.00.06597
27130.00.06082
31940.00.05584
37600.00.05108
44250.00.04655
52090.00.04228
61320.00.03828
72170.00.03455
84960.00.0311

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]
Coefficients
Fit range

E = 33.91 – 100000