{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Ni", "surface_phase": "pc", "species": {"text": "(3He)+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
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Sputtering of (3He)+ on Ni(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.1421, "q": 0.3183, "mu": 1.358, "epsilonL": 0.0001681, "Eth": 33.91}, "E_min": 33.91, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
33.91	0.0	
39.92	0.0008617	
46.99	0.002817	
55.31	0.006116	
65.1	0.01105	
76.63	0.01779	
90.2	0.02621	
106.2	0.0359	
125.0	0.04626	
147.1	0.05662	
173.2	0.06646	
203.8	0.07545	
239.9	0.08346	
282.4	0.09051	
332.4	0.09668	
391.3	0.1021	
460.6	0.1067	
542.1	0.1108	
638.1	0.1143	
751.1	0.1172	
884.2	0.1197	
1041.0	0.1216	
1225.0	0.123	
1442.0	0.1239	
1697.0	0.1243	
1998.0	0.124	
2352.0	0.1232	
2768.0	0.1218	
3258.0	0.1199	
3835.0	0.1174	
4515.0	0.1143	
5314.0	0.1107	
6255.0	0.1067	
7363.0	0.1023	
8667.0	0.09756	
10200.0	0.09254	
12010.0	0.08733	
14130.0	0.08199	
16640.0	0.07661	
19580.0	0.07125	
23050.0	0.06597	
27130.0	0.06082	
31940.0	0.05584	
37600.0	0.05108	
44250.0	0.04655	
52090.0	0.04228	
61320.0	0.03828	
72170.0	0.03455	
84960.0	0.0311	
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