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Plasma-Surface Interaction Data Set 283

Sputtering of T+ on Ni(pc) at 300 K

  1. B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of T+ on Ni(pc) at 300 K

angle = 0.0 deg E /eV P
30.770.0
36.30.0003797
42.810.001288
50.490.002894
59.550.005421
70.230.009059
82.830.01387
97.70.01973
115.20.02627
135.90.03302
160.30.0395
189.00.04536
223.00.05044
263.00.0547
310.10.05818
365.80.06098
431.40.06318
508.80.06485
600.10.06606
707.80.06684
834.80.06722
984.60.06722
1161.00.06685
1370.00.06613
1615.00.06506
1905.00.06367
2247.00.06197
2650.00.05998
3126.00.05774
3686.00.05527
4348.00.05262
5128.00.04984
6048.00.04695
7133.00.044
8413.00.04103
9923.00.03808
11700.00.03519
13800.00.03237
16280.00.02966
19200.00.02707
22650.00.02461
26710.00.02231
31500.00.02015
37150.00.01815
43820.00.0163
51680.00.0146
60950.00.01305
71890.00.01163
84790.00.01035

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]
Coefficients
Fit range

E = 30.77 – 100000