{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Ni", "surface_phase": "pc", "species": {"text": "T+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
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Sputtering of T+ on Ni(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.3185, "q": 0.1734, "mu": 1.388, "epsilonL": 0.0003457, "Eth": 30.77}, "E_min": 30.77, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
30.77	0.0	
36.3	0.0003797	
42.81	0.001288	
50.49	0.002894	
59.55	0.005421	
70.23	0.009059	
82.83	0.01387	
97.7	0.01973	
115.2	0.02627	
135.9	0.03302	
160.3	0.0395	
189.0	0.04536	
223.0	0.05044	
263.0	0.0547	
310.1	0.05818	
365.8	0.06098	
431.4	0.06318	
508.8	0.06485	
600.1	0.06606	
707.8	0.06684	
834.8	0.06722	
984.6	0.06722	
1161.0	0.06685	
1370.0	0.06613	
1615.0	0.06506	
1905.0	0.06367	
2247.0	0.06197	
2650.0	0.05998	
3126.0	0.05774	
3686.0	0.05527	
4348.0	0.05262	
5128.0	0.04984	
6048.0	0.04695	
7133.0	0.044	
8413.0	0.04103	
9923.0	0.03808	
11700.0	0.03519	
13800.0	0.03237	
16280.0	0.02966	
19200.0	0.02707	
22650.0	0.02461	
26710.0	0.02231	
31500.0	0.02015	
37150.0	0.01815	
43820.0	0.0163	
51680.0	0.0146	
60950.0	0.01305	
71890.0	0.01163	
84790.0	0.01035	
-----