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Plasma-Surface Interaction Data Set 282

Sputtering of D+ on Ni(pc) at 300 K

  1. B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of D+ on Ni(pc) at 300 K

angle = 0.0 deg E /eV P
42.040.0
49.270.0001937
57.740.0007955
67.670.001986
79.310.003956
92.940.006794
108.90.01039
127.70.01442
149.60.01845
175.30.02213
205.50.02526
240.80.02782
282.20.02985
330.70.03145
387.60.03268
454.20.03362
532.30.03431
623.80.03479
731.10.03507
856.80.03517
1004.00.0351
1177.00.03486
1379.00.03445
1616.00.03388
1894.00.03316
2220.00.0323
2601.00.03129
3049.00.03017
3573.00.02894
4187.00.02762
4907.00.02623
5751.00.02479
6740.00.02332
7898.00.02183
9256.00.02035
10850.00.01888
12710.00.01746
14900.00.01607
17460.00.01474
20460.00.01348
23980.00.01228
28100.00.01116
32940.00.01011
38600.00.009133
45240.00.00823
53010.00.007398
62130.00.006636
72810.00.00594
85330.00.005307

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]
Coefficients
Fit range

E = 42.04 – 100000