{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Ni", "surface_phase": "pc", "species": {"text": "D+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
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Sputtering of D+ on Ni(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.2649, "q": 0.0904, "mu": 1.653, "epsilonL": 0.0003514, "Eth": 42.04}, "E_min": 42.04, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
42.04	0.0	
49.27	0.0001937	
57.74	0.0007955	
67.67	0.001986	
79.31	0.003956	
92.94	0.006794	
108.9	0.01039	
127.7	0.01442	
149.6	0.01845	
175.3	0.02213	
205.5	0.02526	
240.8	0.02782	
282.2	0.02985	
330.7	0.03145	
387.6	0.03268	
454.2	0.03362	
532.3	0.03431	
623.8	0.03479	
731.1	0.03507	
856.8	0.03517	
1004.0	0.0351	
1177.0	0.03486	
1379.0	0.03445	
1616.0	0.03388	
1894.0	0.03316	
2220.0	0.0323	
2601.0	0.03129	
3049.0	0.03017	
3573.0	0.02894	
4187.0	0.02762	
4907.0	0.02623	
5751.0	0.02479	
6740.0	0.02332	
7898.0	0.02183	
9256.0	0.02035	
10850.0	0.01888	
12710.0	0.01746	
14900.0	0.01607	
17460.0	0.01474	
20460.0	0.01348	
23980.0	0.01228	
28100.0	0.01116	
32940.0	0.01011	
38600.0	0.009133	
45240.0	0.00823	
53010.0	0.007398	
62130.0	0.006636	
72810.0	0.00594	
85330.0	0.005307	
-----