pwiDB

Plasma-Surface Interaction Data Set 279

Sputtering of Kr⁺ on Co(pc) at 300 K

B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of Kr⁺ on Co(pc) at 300 K

angle = 0.0 deg	E /eV	P
	28.53	4.519e-38
	33.71	6.949e-05
	39.81	0.0004633
	47.03	0.001635
	55.56	0.004445
	65.62	0.01045
	77.52	0.02228
	91.57	0.04402
	108.2	0.0812
	127.8	0.1398
	150.9	0.2239
	178.3	0.3328
	210.6	0.4601
	248.8	0.5968
	293.8	0.7349
	347.1	0.8699
	410.0	1.001
	484.3	1.13
	572.1	1.258
	675.8	1.387
	798.3	1.519
	943.0	1.655
	1114.0	1.797
	1316.0	1.944
	1554.0	2.097
	1836.0	2.256
	2169.0	2.421
	2562.0	2.591
	3026.0	2.766
	3574.0	2.946
	4222.0	3.129
	4988.0	3.316
	5892.0	3.504
	6959.0	3.693
	8221.0	3.883
	9711.0	4.071
	11470.0	4.256
	13550.0	4.437
	16010.0	4.612
	18910.0	4.78
	22330.0	4.94
	26380.0	5.088
	31160.0	5.225
	36810.0	5.347
	43480.0	5.453
	51360.0	5.541
	60670.0	5.609
	71670.0	5.656
	84660.0	5.679

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]

Coefficients

lambda = 0.3021
q = 14.53
mu = 2.221
epsilonL = 3.098e-06
Eth = 28.53

Fit range

E = 28.53 – 100000